Micro Electret Energy Harvesting Device with Analogue Impedance Conversion Circuit

نویسندگان

  • Yuji Suzuki
  • Masato Edamoto
  • Nobuhide Kasagi
  • Kimiaki Kashiwagi
  • Yoshitomi Morizawa
  • Toru Yokoyama
  • Tomonori Seki
  • Masatoshi Oba
چکیده

A vibration-driven electret generator has been developed for energy harvesting applications. By using parylene as the spring material, a low-resonant-frequency MEMS generator is realized. Large inplane amplitude of 0.8 mm at the resonant frequency as low as 37 Hz has been achieved. With our early prototype, output power of 0.28 μW has been obtained. We also demonstrate electret-powered operation of LED using a low-power-consumption impedance conversion circuit.

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تاریخ انتشار 2009